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Beschreibung

BAM offers the test material EDS-TM002, whose spectrum ?reacts? sensitively to malfunctions of the EDS. All the measurements necessary for the performance check of an EDS at an scanning electron microscope in compliance with ISO 15632:2012 ?Microbeam Analysis ? Selected instrumental performance parameters for the specification and checking of energy dispersive X-ray spectrometers for use in electron probe microanalysis? can be carried out with this one specimen. It consists of a thick layer (of about 6 ?m) containing the elements C, Al, Mn, Cu and Zr deposited on a silicon substrate.The evaluation of the measurement is possible in principle with the software package available from spectrometer manufacturers. However, the evaluation of the EDS performance can be carried out in an easier and quicker way by means of the software package ?EDS Spectrometer Test? offered (optionally) also by BAM together with the EDS-TM002 test material. The software requires that the detector is provided with a thin film window. For detectors equipped with a beryllium window the software is not applicable.